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originally published March 2005
SEMI C29-0301 (technical revision)
それぞれの方法は，管理された連続化学反応の間に基板より除去された材料の合計の量を，提供する。それぞれの方法に対し，この結果は名目上同一である。
2 These methods test the chemical resistance of color filters by utilizing chemicals and conditions typically employed in FPD manufacturing
SEMI D19 — Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filter
C09500 - SEMI C95 - Guide for Pentakis Dimethylamino Tantalum Revision:SEMI C95-0516 - Current originally published March 2005This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 16, 2016. Available at www. semiviews. org and www. semi. org in May 2016. The purpose of this Document is to provide a guide for pentakis dimethylamino tantalum (PDMAT) for which a need has been identified. The scope of this Document covers a tier of PDMAT, which is